Two Step Fabrication of Tungsten Nanotips by AC Electrochemical Etching and Laser Irradiation for Nanoprobing on Advanced Technology Nodes

Wednesday, November 14, 2012

West Hall 1 (Phoenix Convention Center)

Dr. M. K. Dawood , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

Z. H. Mai , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

Mr. T. H. Ng , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

H. Tan , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

P. K. Tan , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

Mr. C.K. Oh , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

Jeffrey Lam , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

24.1 Two Step Fabrication of Tungsten Nanotips by AC Electrochemical Etching and Laser Irradiation for Nanoprobing on Advanced Technology Nodes