24.14 TEM Failure Analysis and Root Cause Understanding of Nitride Spacer Bridging In 45nm Manufacturing Processes

Wednesday, November 14, 2012
West Hall 1 (Phoenix Convention Center)
Dr. Binghai Liu , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Zhiqiang Mo , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Mr. Yuan Yao , Singapore, Singapore, Singapore
Ms. Ye Chen , Globalfoundries,Singapore, Singapire, Singapore
Changqing Chen , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
Ghim Boon Ang , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
Yogas Yogas , singapore, Singapore, Singapore
Robin Tan , Globalfoundries Singapore, singapore, Singapore