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24.12 TEM/FIB Technical Solutions to The Radiation Damage By Electron Beam to Low K/Ultra Low K Dielectrics

Wednesday, November 14, 2012
West Hall 1 (Phoenix Convention Center)
Ms. Ye chen , Globalfoundries,Singapore, Singapire, Singapore
Dr. Binghai Liu , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Zhiqiang Mo , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Chue Yuin wang , Globalfoundries Singapore, Singapore, Singapore
Jili wang , globalfoundries Singapore, Singapore, Singapore
See more of: Session 24: Exhibitor Dessert Reception and Poster Session
See more of: Symposium