Thermal Investigations on CMOS Integrated Micro-hot-plates Using IR Thermography

Wednesday, November 14, 2012

West Hall 1 (Phoenix Convention Center)

Mr. Christian Schmidt , Fraunhofer Institute for Mechanics of Materials, Halle, Germany

Frank Altmann , Fraunhofer Institute for Mechanics of Materials, Halle, Germany

Mr. Giorgio Mutinati , AIT Austrian Institute of Technology GmbH, Vienna, Austria

Elise Brunet , AIT Austrian Institute of Technology GmbH, Vienna, Austria

Stephan Steinhauer , AIT Austrian Institute of Technology GmbH, Vienna, Austria

Anton Koeck , AIT Austrian Institute of Technology GmbH, Vienna, Austria

Dr. Hans Kruschke , InfraTec GmbH, Dresden, Germany

J. Teva , austriamicrosystems AG, Unterpremstaetten, Austria

Jochen Kraft , austriamicrosystems AG, Unterpremstaetten, Austria

J. Siegert , austriamicrosystems AG, Unterpremstaetten, Austria

Frank Schrank , austriamicrosystems AG, Unterpremstaetten, Austria

Martin Siegele , University of Applied Sciences, Wiener Neustadt, Austria

Christoph Gamauf , University of Applied Sciences, Wiener Neustadt, Austria

Alexander Nemecek , University of Applied Sciences, Wiener Neustadt, Austria

24.5 Thermal Investigations on CMOS Integrated Micro-hot-plates Using IR Thermography