Application of Scanning Probe Microscopy Techniques with Electrical Modules in Via Related Defects

Wednesday, November 14, 2012

West Hall 1 (Phoenix Convention Center)

Dr. Xiang-Dong Wang , Freescale Semiconductor, Tempe, AZ

Dr. David theodore , Freescale Semiconductor, Tempe, AZ

Mr. Gil Garteiz , Freescale Semiconductor, Chandler, AZ

Paul Sanders , Freescale Semiconductor, Tempe, AZ

24.10 Application of Scanning Probe Microscopy Techniques with Electrical Modules in Via Related Defects