39th International Symposium for Testing and Failure Analysis (November 3 – 7, 2013)

November 03 - 07, 2013

Jan Schischka

Fraunhofer Institute for Mechanics of Materials
Centre for Applied Microstructure Diagnostics (CAM)
Walter-Huelse-Strasse 1
Halle Germany D-06120

Papers:
2.2 Sample Preparation Strategies for Fast and Effective Failure Analysis of 3D Devices