Mr. Erik Paul

Engineer Integration & Yield Engineering
GLOBALFOUNDRIES Dresden Module One Limited Liability Company & Co. KG
Yield Engineering (Physical Failure Analysis)
Wilschdorfer Landstr. 101
DRESDEN Germany 01109

Papers:
11.4 SEM-Based Nanoprobing On 40, 32 and 28nm CMOS Devices-Challenges for Semiconductor Failure Analysis