11.4
SEM-Based Nanoprobing On 40, 32 and 28nm CMOS Devices-Challenges for Semiconductor Failure Analysis

Thursday, November 7, 2013: 10:30 AM
Meeting Room 230A (San Jose McEnery Convention Center)
Mr. Erik Paul , GLOBALFOUNDRIES Dresden Module One Limited Liability Company & Co. KG, DRESDEN, Germany
Mr. Ryan Ross , GlobalFoundries, Malta, NY