Mr. G.R. Low
Mr. G.R. Low
Globalfoundries Singapore Pte. Ltd.
Technology Development-New Technology Prototyping
Globalfoundries Singapore Pte. Ltd., 60 Woodlands Industrial Park D Street 2,
Singapore 738406.
Singapore
Singapore
738406
Papers:
13.2
Cross Sectional Focus Ion Beam Top-Down Delayering