13.2
Cross Sectional Focus Ion Beam Top-Down Delayering
Cross Sectional Focus Ion Beam Top-Down Delayering
Thursday, November 7, 2013: 1:30 PM
Meeting Room 230B (San Jose McEnery Convention Center)
Summary:
Top-down layer by layer delayering inspection with polisher and progressive cross-sectional Focus Ion Beam (XFIB) slicing are two common approaches for Physical Failure Analysis (PFA). This paper uses cross-sectional focus ion beam to perform top down layer by layer delayering inspection. The advantages of this technique include: 1) having a better control of the delayering progress 2) prevention of over-delayering and 3) having the ability to perform real time Scanning Electron Microscopy (SEM) view during top-down XFIB delayering to achieve a better understanding of the defect formation.
Top-down layer by layer delayering inspection with polisher and progressive cross-sectional Focus Ion Beam (XFIB) slicing are two common approaches for Physical Failure Analysis (PFA). This paper uses cross-sectional focus ion beam to perform top down layer by layer delayering inspection. The advantages of this technique include: 1) having a better control of the delayering progress 2) prevention of over-delayering and 3) having the ability to perform real time Scanning Electron Microscopy (SEM) view during top-down XFIB delayering to achieve a better understanding of the defect formation.