41st International Symposium for Testing and Failure Analysis (November 1 - 5, 2015)

November 01 - 05, 2015

Michael Sadowski

Berlin University of Technology
Semiconductor Devices
Einsteinufer 19, Sekr. E4
Berlin Germany 10587

Papers:
4.3 Turning sample into (re)solution: Focused Ion Beam shaped Solid Immersion Lenses