41st International Symposium for Testing and Failure Analysis (November 1 - 5, 2015)

November 01 - 05, 2015

Mr. Xiaogang Zheng

Semiconductor Manufacturing International (Tianjin) Corporation
Failure Analysis Laboratory
19 Xing hua Avenue, Xi Qing Economic Development Area, P. R. China
TianJin China 300385

Papers:
11.2 SIMS Quantitative Analysis and Optimization for Ion Implantation Angle Deviation