FA Processes Case Studies - Poster

Wednesday, November 8, 2017: 1:30 PM-3:30 PM
Dr. James J. Demarest, IBM and Dr. Andreas Meyer, Globalfoundries Fab 1
Failure Analysis of Variable Resister
Mr. yasunobu iwai, Oki Engineering Corporatio
Impact of Carbon on Threshold Voltage Shift in MOSFET Studied by 3D Atom Probe Tomography
Dr. Ju-Heon Kim, Samsung Electronics Co.,Ltd.
Charge-Induced Damage on SOI Wafers: A Case Study
Ms. Darlene M. Udoni, Sandia National Laboratories; Ms. Mary A. Miller, Sandia National Laboratories
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