Time-Resolved Imaging of VLSI Circuits using a Single-Point Single-Photon Detector and a Scanning Head
Time-Resolved Imaging of VLSI Circuits using a Single-Point Single-Photon Detector and a Scanning Head
Monday, November 11, 2019: 10:20 AM
Portland Ballrooms 254-255 (Oregon Convention Center)
Summary:
In this paper, we present the first prototype of a Scanning Time-Resolved Emission (STRE) system consisting of a high-sensitivity, low-noise, and low-jitter single-point Superconducting Single-Photon Detector (SSPD) combined with a specialized scanning head of a Laser Scanning Microscope (LSM). This idea was first proposed in late 2006 [1] but required the right combination of detector, customization, and collaboration with a tool vendor to get to fruition. It should be understood that this is still a prototype system under development and significant improvements in acquisition time, resolutions, and performance are expected in the near future. In this paper, we will also present the first preliminary results acquired using a test chip fabricated in 32 nm SOI.
In this paper, we present the first prototype of a Scanning Time-Resolved Emission (STRE) system consisting of a high-sensitivity, low-noise, and low-jitter single-point Superconducting Single-Photon Detector (SSPD) combined with a specialized scanning head of a Laser Scanning Microscope (LSM). This idea was first proposed in late 2006 [1] but required the right combination of detector, customization, and collaboration with a tool vendor to get to fruition. It should be understood that this is still a prototype system under development and significant improvements in acquisition time, resolutions, and performance are expected in the near future. In this paper, we will also present the first preliminary results acquired using a test chip fabricated in 32 nm SOI.