Visualization and Measurements of 3D Structures in Memory and Logic Devices

Monday, November 11, 2019: 2:25 PM
D 137/138 (Oregon Convention Center)
Dr. Amir Avishai , CARL ZEISS INC, Pleasanton, CA
Dr. Dmitry Klochkov , 2Carl Zeiss SMT GmbH, Oberkochen, Germany
Dr. Thomas Korb , 2Carl Zeiss SMT GmbH, Oberkochen, Germany
Dr. Jen Timo Neumann , 2Carl Zeiss SMT GmbH, Oberkochen, Germany
Dr. Eugen Foca , 2Carl Zeiss SMT GmbH, Oberkochen, Germany
Dr. Alex Buxbaum , CARL ZEISS INC, Pleasanton, CA