nanoProbing on 7 nm technology SRAM: Challenges and Solutions

Tuesday, November 12, 2019: 11:10 AM
D 137/138 (Oregon Convention Center)
Dr. Anqi Qiu , Thermofisher Scientific, Richardson, TX
Mr. William Lowe , Thermofisher Scientific, Richardson, TX
Mr. Mridul Arora , Thermofisher Scientific, Richardson, TX


Nanoprobing systems have evolved to meet the challenges from recent innovations in the semiconductor manufacturing process. This is demonstrated through an exhibition of standard SRAM measurements on 7 nm technology. Both AFM and SEM based nanoprobers, Hyperion II and nProber III, respectively, are shown to meet or exceed the requirements for measuring 7nm technology and beyond. Best-known methods for sample preparation as well as enabling advancements in the nanoprobing platforms are discussed.