45th International Symposium for Testing and Failure Analysis (Nov. 10-14, 2019)
November 10 - 14, 2019
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Mr. Scott Silverman
Research Scientist
Varioscale
San Marcos, CA
USA 92078
Papers:
Submicron thinning of finFET devices with high power density observed in 10/7nm process nodes using high aspect ratio trenches