SAMPLE PREPARATION AND DEVICE DEPROCESSING: Optimization of cross sectioning for solder joint using broad Ar ion beam milling with temperature control

Tuesday, December 8, 2020: 2:20 PM
Ms. Natsuko Asano , JEOL Ltd., Akishima, Tokyo, Japan
Ms. Tamae Omoto , JEOL Ltd., Akishima, Tokyo, Japan
Dr. Jinfeng Lu , JEOL Ltd., Akishima, Tokyo, Japan
Mr. Hirobumi Morita , Oxford Japan, tokyo, Japan
Dr. Natasha Erdman , JEOL USA Inc., Peabody, MA
Dr. Shunsuke Asahina , JEOL Ltd., Akishima, Tokyo, Japan

See more of: Poster Session II
See more of: EDFAS Virtual Workshop