Poster Session II

Tuesday, December 8, 2020: 1:20 PM-2:50 PM
Ms. Yan Li, Intel
1:20 PM
MICROSCOPY: Methods of Improving Accuracy in InGaN MQWs Quantitative Analysis by STEM/EDS
Dr. Jong-Shing Bow, Integrated Service Technology Inc.; Dr. Wei-Chih Lai, Integrated Service Technology Inc.
1:35 PM
MICROSCOPY: Semiconductor device radiation damage in TEM
Mr. Timothy Yeow, Thermo Fisher Scientific; Dr. Dong Tang, Thermo Fisher Scientific; Dr. Alexandrou Ioannis, Thermo Fisher Scientific; Guoda Lian, IBM Inc.; Steve Boettcher, IBM Inc.; Ali Malik, IBM Inc.
1:50 PM
FIB CIRCUIT ANALYSIS AND EDIT: Influence of Dose Delivery of Low-Beam Energy STI Exposure on FinFET Devices
Mr. Michael Wong, Thermo Fisher Scientific; Mr. Oleg Sidorov, Thermo Fisher Scientific; Mr. Or Haimson, Annapurna Labs Ltd, Amazon; Mr. Roy Goldman, Annapurna Labs Ltd, Amazon; Dr. David Donnet, Thermo Fisher Scientific; Mr. David Tien, Thermo Fisher Scientific; Mr. Neel Leslie, Thermo Fisher Scientific; Ms. Debbora Ahlgren, Thermo Fisher Scientific
2:05 PM
FIB SAMPLE PREPARATION: Automated sample depth targeting with low kV cleaning by Focused Ion Beam Microscopy for Atom Probe Tomography
Mr. Woo Jun Kwon, Thermo Fisher Scientific; Jisu Ryu, Thermo Fisher Scientific; Michael Schmidt, Thermo Fisher Scientific; Nicholas Croy, Thermo Fisher Scientific; Dr. Christopher H. Kang, Thermo Fisher Scientific
2:20 PM
SAMPLE PREPARATION AND DEVICE DEPROCESSING: Optimization of cross sectioning for solder joint using broad Ar ion beam milling with temperature control
Ms. Natsuko Asano, JEOL Ltd.; Ms. Tamae Omoto, JEOL Ltd.; Dr. Jinfeng Lu, JEOL Ltd.; Mr. Hirobumi Morita, Oxford Japan; Dr. Natasha Erdman, JEOL USA Inc.; Dr. Shunsuke Asahina, JEOL Ltd.
2:35 PM
CASE STUDIES - FA PROCESS: Cell Charge Loss by Formation of Inversion Channel in DRAM
Mr. Hoonchang yang, Samsung Electronics; Mr. Keunchul Ryu, Samsung Electronics Co.,Ltd; Mr. Dongin Seo, Samsung Electronics Co.,Ltd; Mr. Kyoungrak Cho, Samsung Electronics; Mr. Junsik Park, Samsung Electronics; Dr. Incheol Nam, Samsung Electronics; Mr. Daesun Kim, Samsung Electronics Co.,Ltd; Mr. Heeil Hong, Samsung Electronics Co.,Ltd; Dr. Sungsoo Yim, Samsung Electronics; Mr. Jonghoon Kim, Samsung Electronics; Mr. Jung-Bae Lee, Samsung Electronics
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