Cross sectional passive voltage contrast approach for gate oxide breakdown defect isolation and visualization for TEM analysis

Tuesday, December 8, 2020: 3:50 PM

Dr. S. L. Ting , Globalfoundries Singapore Pte Ltd., Singapore, Singapore

Mr. P. K. Tan , Globalfoundries Singapore Pte Ltd., Singapore, Singapore

Dr. Y. L. Pan , Globalfoundries Singapore Pte Ltd., Singapore, Singapore

Ms. H. H. W. Thoungh , Globalfoundries Singapore Pte Ltd., Singapore, Singapore

Ms. S.Y Thum , Globalfoundries Singapore Pte Ltd., Singapore, Singapore

Mr. F. Rivai , Globalfoundries Singapore Pte Ltd., Singapore, Singapore

Mr. P.T. Ng , Globalfoundries Singapore Pte Ltd., Singapore, Singapore

Dr. S. J. Moon , Globalfoundries Singapore Pte Ltd., Singapore, Singapore

Mr. D. Nagalingam , Globalfoundries Singapore Pte Ltd., Singapore, Singapore

Ms. T.T. Yu , Globalfoundries Singapore Pte Ltd., Singapore, Singapore

Ms. S.P. Neo , Globalfoundries Singapore Pte Ltd., Singapore, Singapore

Dr. C. Q. Chen , Globalfoundries Singapore Pte Ltd., Singapore, Singapore