FinFET Transistor Output Drive Performance Modification by Focused Ion Beam (FIB) Chip Circuit Editing
FinFET Transistor Output Drive Performance Modification by Focused Ion Beam (FIB) Chip Circuit Editing
Wednesday, December 9, 2020: 11:40 AM
Summary:
Focused Ion Beam (FIB) chip circuit editing is a highly specialized lab technique for making direct changes to the functionality of completed integrated circuits for the purpose of rapid prototyping. In this case study, we were successful in modifying the output current of a 12nm FinFET driver by selectively trimming away 50% of the device area through the underside of the structure. The edited modules no longer exhibited the race condition that the original high drive current units exhibited, and correlated well with the circuit timing models and the proposed mask change. Achieving this successful implementation required refinement in existing edit techniques and the development of new protocols, including the use of backside electron imaging to verify CAD coordinate overlay for final mill box placement.
Focused Ion Beam (FIB) chip circuit editing is a highly specialized lab technique for making direct changes to the functionality of completed integrated circuits for the purpose of rapid prototyping. In this case study, we were successful in modifying the output current of a 12nm FinFET driver by selectively trimming away 50% of the device area through the underside of the structure. The edited modules no longer exhibited the race condition that the original high drive current units exhibited, and correlated well with the circuit timing models and the proposed mask change. Achieving this successful implementation required refinement in existing edit techniques and the development of new protocols, including the use of backside electron imaging to verify CAD coordinate overlay for final mill box placement.