A novel sample preparation approach for dopant profiling of 14 nm FinFET devices with Scanning Capacitance Microscopy

Monday, December 7, 2020: 3:55 PM
Dr. Nirmal Adhikari , Globalfoundries, Essex Junction, VT
Mr. Phil Kaszuba , Globalfoundries, Essex Junction, VT
Mr. Gaitan Mathieu , Globalfoundries, Essex Junction, VT
Dr. Erik F. Mccullen , Globalfoundries, Essex Junction, VT
Mr. Thom Hartswick , Globalfoundries, Essex Junction, VT
Mr. Joe Myers , Globalfoundries, Essex Junction, VT

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