Scanning Probe Analysis

Monday, December 7, 2020: 3:55 PM-4:20 PM
Dr. Pai Tangyunyong, Sandia National Laboratories and Mr. Phil Kaszuba, Globalfoundries
3:55 PM
A novel sample preparation approach for dopant profiling of 14 nm FinFET devices with Scanning Capacitance Microscopy
Dr. Nirmal Adhikari, Globalfoundries; Mr. Phil Kaszuba, Globalfoundries; Mr. Gaitan Mathieu, Globalfoundries; Dr. Erik F. Mccullen, Globalfoundries; Mr. Thom Hartswick, Globalfoundries; Mr. Joe Myers, Globalfoundries
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