Back End of Line (BEOL) Pulse Nanoprobing Fault Isolation Technique on RF Device with Soft Failure Issue

Wednesday, December 9, 2020: 2:45 PM
Mr. P. K. Tan , Globalfoundries Singapore Pte Ltd., Singapore, Singapore
Dr. Chang Qing Chen , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Mr. F. Rivai , Globalfoundries Singapore Pte Ltd., Singapore, Singapore
Dr. Alfred C.T. Quah , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Mr. P.T. Ng , Globalfoundries Singapore Pte Ltd., Singapore, Singapore
Mr. Shreyas Mohan Parab , Globalfoundries Singapore Pte Ltd., Singapore, Singapore
Mr. Yinzhe Ma , Globalfoundries Singapore Pte Ltd., Singapore, Singapore
Mr. Ran He , Chartered Semiconductor Manufacturing Pte. Ltd., Singapore, Singapore