Nanoprobing and Electrical Characterization I
Wednesday, December 9, 2020: 2:45 PM-3:10 PM
Mr. John Sanders, Thermofisher and Mr. David Albert, IBM
2:45 PM
Back End of Line (BEOL) Pulse Nanoprobing Fault Isolation Technique on RF Device with Soft Failure Issue
Mr. P. K. Tan, Globalfoundries Singapore Pte Ltd.;
Dr. Chang Qing Chen, GLOBALFOUNDRIES Singapore Pte Ltd;
Mr. F. Rivai, Globalfoundries Singapore Pte Ltd.;
Dr. Alfred C.T. Quah, GLOBALFOUNDRIES Singapore Pte Ltd;
Mr. P.T. Ng, Globalfoundries Singapore Pte Ltd.;
Mr. Shreyas Mohan Parab, Globalfoundries Singapore Pte Ltd.;
Mr. Yinzhe Ma, Globalfoundries Singapore Pte Ltd.;
Mr. Ran He, Chartered Semiconductor Manufacturing Pte. Ltd.
