47th International Symposium for Testing and Failure Analysis (Oct. 31 - Nov. 4, 2021)
October 31 - November 04, 2021
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Mr. Mark Najarian
FEI
SARATOGA SPRINGS, NY
USA 12866
Papers:
FIB SAMPLE PREPARATION: Enabling Automated Sample Delayering, Imaging, and Probing Prep with an Adaptive Endpointing Workflow
FIB SAMPLE PREPARATION: Workflow solution for depth resolved 3D NAND critical dimension metrology