47th International Symposium for Testing and Failure Analysis (Oct. 31 - Nov. 4, 2021)
October 31 - November 04, 2021
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Mr. Jozef Vincenc Oboňa
TESCAN Brno s.r.o.
Brno Czech Republic 62300
Papers:
EMERGING FA TECHNIQUES AND CONCEPTS: Pairing Laser Ablation and Xe Plasma FIB-SEM: An approach for precise end-pointing in large-scale Physical Failure Analysis in the Semiconductor Industry