48th International Symposium for Testing and Failure Analysis (Oct. 30 - Nov. 3, 2022)
October 30 - November 03, 2022
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Dr. Erin Stuckert
Senior Engineer
IBM Research
Albany, NY
USA 12203
Papers:
Precession Electron Diffraction (PED) Strain Characterization in Stacked Nanosheet FET Structure
