Precession Electron Diffraction (PED) Strain Characterization in Stacked Nanosheet FET Structure

Wednesday, November 2, 2022: 10:25 AM
Ballroom A (Pasadena Convention Center)
Dr. Juntao Li , IBM Research, Albany, NY
Dr. Shogo Mochizuki , IBM Research, Albany, NY
Dr. Erin Stuckert , IBM Research, Albany, NY
Mr. Lukas Tierney , IBM Research, Albany, NY
Mr. Kerry Toole , IBM Research, Albany, NY
Mr. Rich Conte , IBM Research, Albany, NY
Dr. Nicolas Loubet , IBM Research, Albany, NY

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