NANO/SCANNING PROBE USER GROUP
The analytical techniques of nanoprobing and atomic force microscopy are seeing a renaissance in their use in semiconductor process development and yield engineering. Having long been available for "direct" measurements of properties such as topography or the various current/ voltage/ conductance properties of a single device, new interest is gaining in the additional properties of device performance or junction structure that these techniques enable.
The 2022 ISTFA Nano/Scanning Probe Users Group meeting will start out with four lightning talks to cover the spread of techniques available in this field: One will be about AFM measurements; one about nanoprobing, per se, and one about advanced junction or other exotic properties. An open discussion will follow. Greg Johnson, Zeiss Microscopy and Mr. Nicholas Antoniou, Primenano inc.,