Exploring the effectiveness of combining Electron-Beam Probing and Optical Techniques in a 16nm technology device

Wednesday, October 30, 2024: 2:20 PM
The Pointe (Hilton San Diego Bayfront)
Mr. Antonio Saavedra , Technische Universität Berlin, Berlin, Berlin, Germany
Dr. Elham Amini , Technische Universität Berlin, Berlin, Berlin, Germany
Mr. Jörg Jatzkowski , Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Halle, Sachsen-Anhalt, Germany
Dr. Tuba Kiyan , Technische Universität Berlin, Berlin, Berlin, Germany
Mr. Lars Renkes , Technische Universitaet Berlin, Berlin, Berlin, Germany
Prof. Christian Boit , Technische Universität Berlin, Berlin, Berlin, Germany
Dr. Frank Altmann , Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Halle, Sachsen-Anhalt, Germany
Dr. Sebastian Brand , Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Halle, Saxony-Anhalt, Germany
Prof. Jean-Pierre Seifert , Technische Universität Berlin, Berlin, Berlin, Germany