Enhanced defect identification in large-area TEG using electron beam-based techniques

Wednesday, November 19, 2025
Ms. Hyunah Cho , Sungkyunkwan University, Gyeonggi-do, Suwon-si, Korea, Republic of (South)
Seonghee Park , Samsung Electronics, Gyeonggi-do, Hwaseong-si, Korea, Republic of (South)
Prof. Yunseok Kim , Sungkyunkwan University, Gyeonggi-do, Suwon-si, Korea, Republic of (South)

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