E-beam Probing for Hardware Security Assessment of Data Leakage in Microcontrollers: A Flash Memory Case Study
E-beam Probing for Hardware Security Assessment of Data Leakage in Microcontrollers: A Flash Memory Case Study
Wednesday, October 7, 2026: 4:40 PM
Summary:
Electron beam (e-beam) probing was investigated as a hardware security assessment technique for evaluating data leakage vulnerabilities in microcontrollers. Using flash memory as a case study, e-beam probing extracted data by observing internal signal lines within peripheral circuits during device operation. Critically, e-beam probing demonstrated single-acquisition capability for single event or non-periodic signals. An internal signal line at lower metal layers was identified through optical microscopy and scanning electron microscopy (SEM), then exposed using localized focus ion beam (FIB) milling. E-beam voltage probing (EVP) identified the line as one of 256 parallel output signals, enabling data extraction from the embedded flash memory. With optimized parameters, EVP extracted data from single operations without averaging. E-beam voltage imaging (EVI) provided spatial frequency mapping at 332 kHz. This study demonstrated e-beam probing as a valuable technique for assessing data leakage vulnerabilities through internal signal paths in microcontrollers.
Electron beam (e-beam) probing was investigated as a hardware security assessment technique for evaluating data leakage vulnerabilities in microcontrollers. Using flash memory as a case study, e-beam probing extracted data by observing internal signal lines within peripheral circuits during device operation. Critically, e-beam probing demonstrated single-acquisition capability for single event or non-periodic signals. An internal signal line at lower metal layers was identified through optical microscopy and scanning electron microscopy (SEM), then exposed using localized focus ion beam (FIB) milling. E-beam voltage probing (EVP) identified the line as one of 256 parallel output signals, enabling data extraction from the embedded flash memory. With optimized parameters, EVP extracted data from single operations without averaging. E-beam voltage imaging (EVI) provided spatial frequency mapping at 332 kHz. This study demonstrated e-beam probing as a valuable technique for assessing data leakage vulnerabilities through internal signal paths in microcontrollers.