Prof. Chih-Shan Tan

Master student
Institute of Electronics College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University, Hsinchu, Taiw
Institute of Electronics College of Electrical and Computer Engineering
Hsinchu Taiwan 300

Papers:

Influence of Implantation Energy on the Microstructure and Resistivity of Phosphorus-Implanted Silicon Carbide during 355 nm Laser Annealing