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MEMS | ||||
Location: Jr. Ballroom (Worcester's Centrum Centre) | ||||
(Please check final room assignments on-site). | ||||
Session Description: | ||||
Editors: | Mr. David Vallett IBM Systems and Technology Group, Essex Jct., VT Dr. William Vanderlinde Laboratory for Physical Sciences, College Park, MD | |||
Session Chair: | Mr. Jeremy A. Walraven Sandia National Labs, Albuquerque, NM | |||
8:00 AM | MEMS Materials and Fabrication Processes | |||
9:00 AM | Failure Mechanisms in MEMS | |||
10:00 AM | Break | |||
10:15 AM | Techniques for Failure Analysis and Qualification of MEMS | |||
11:15 AM | Optoelectronic Methodologies for MEMS and Electronic Packaging characterization |