|
||||
| Back to "Tutorial" Search | Back to Main Search | |||
| MEMS | ||||
| Location: Jr. Ballroom (Worcester's Centrum Centre) | ||||
| (Please check final room assignments on-site). | ||||
| Session Description: | ||||
| Editors: | Mr. David Vallett IBM Systems and Technology Group, Essex Jct., VT Dr. William Vanderlinde Laboratory for Physical Sciences, College Park, MD | |||
| Session Chair: | Mr. Jeremy A. Walraven Sandia National Labs, Albuquerque, NM | |||
| 8:00 AM | MEMS Materials and Fabrication Processes | |||
| 9:00 AM | Failure Mechanisms in MEMS | |||
| 10:00 AM | Break | |||
| 10:15 AM | Techniques for Failure Analysis and Qualification of MEMS | |||
| 11:15 AM | Optoelectronic Methodologies for MEMS and Electronic Packaging characterization | |||