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Session 6: Sample Prep for Chip Access and Device Deprocessing
Location: Lalique Ballroom (InterContinental Hotel Dallas)
(Please check final room assignments on-site).
Session Description: Without accurate, non-destructive sample preparation, the majority of expensive, high-resolution instruments in our labs would be useless. A wide variety of techniques have been developed to ensure non-destructive die access and accurate physical failure location. This session covers methods dealing with everything from packages to through-wafer vias to transistors to repackaging for electrical test. Topics for discussion can include: • Decapping methods • Delayering methods • Novel mechanical sectioning techniques • New etch techniques (wet and dry) • Ion milling • Techniques for new materials • Re-packaging techniques

Session Chairs:Ms. Becky Holdford Texas Instruments, Dallas, TX
Mr. Robert Champaign Raytheon Network Centric Systems, McKinney, TX
4:05 PMA Novel Wet Etch in-Situ Decapsulation of Devices On Boards
4:30 PMLow Temperature Plasma Decapsulation of Copper-Wire-Bonded and Exposed Copper Metallization Devices
4:55 PMDecapsulation of Copper Bonded Plastic Encapsulated Integrated Circuits Utilizing Laser Ablation and Mixed Acid Chemistry