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Session 8: Sample Prep for Chip Access and Device Deprocessing 2
Location: Lalique Ballroom (InterContinental Hotel Dallas)
(Please check final room assignments on-site).
Session Description:

Session Chairs:Ms. Becky Holdford Texas Instruments, Dallas, TX
Mr. Robert Champaign Raytheon Network Centric Systems, McKinney, TX
8:00 AMA Novel Junction Profiling Methodology
8:25 AMImprovement of Optical Resolution through Chip Backside Using FIB Trenches
8:50 AMCopper to Aluminum Bonding: Interface Clarity and IMC Characterization through New Mechanical Sectioning Methodology
9:15 AMSample Preparation and Analysis On Full-Thickness Silicon Wafers for Wafer-to-Wafer Bonding Process Development
9:40 AMCharacterization and Failure Analysis of 3D Integrated Semiconductor Devices- Novel Tools for Fault Isolation, Target Preparation and High Resolution Material Analysis