7.4 3D Tomography Analysis of Dark Voltage Contrast Failure In PCRAM Device

Tuesday, November 13, 2012: 9:15 AM
102AB (Phoenix Convention Center)
Mr. Jangwon Oh , SK Hynix Semiconductor Inc, Ichon-si, South Korea
Jonghyeop Kim , SK Hynix Semiconductor Inc, Ichon-si, South Korea
Taegwon Lee , SK Hynix Semiconductor Inc, Ichon-si, South Korea
Seungjoon Jeon , SK Hynix Semiconductor Inc, Ichon-si, South Korea
Won Kim , SK Hynix Semiconductor Inc, Ichon-si, South Korea
Hojoung Kim , SK Hynix Semiconductor Inc, Ichon-si, South Korea
Changreol Kim , SK Hynix Semiconductor Inc, Ichon-si, South Korea