9.3 Systematic Approach for the Gate Oxide Failure Caused by Arsenic Cross Contamination

Tuesday, November 13, 2012: 10:45 AM
102AB (Phoenix Convention Center)
Dr. Lei Zhu , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
Huipeng Ng , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
Yanhua Huang , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
Han Wei Teo , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
Kenny Ong , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
Shuting Chen , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
Changqing Chen , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
Ghim Boon Ang , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
You Nan Hua , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
Zheng Li , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore