Tuesday, November 13, 2012: 9:55 AM-11:35 AM
102AB (Phoenix Convention Center)
Session Chairs:
Ms. Rose Ring
and
Mr. David L. Burgess
10:20 AM
A Comprehensive Failure Analysis Metrology and Mechanism Study on Ultra-low-k Film Adhesion Failure
Dr. Shuting Chen, GLOBALFOUNDRIES Singapore Pte Ltd;
Lei Zhu, GLOBALFOUNDRIES Singapore Pte Ltd;
Han Wei Teo, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. Binghai Liu, GLOBALFOUNDRIES Singapore Pte Ltd;
Yanhua Huang, GLOBALFOUNDRIES Singapore Pte Ltd;
Kian Kok, Kenny Ong, GLOBALFOUNDRIES Singapore Pte Ltd;
Zhiqiang Mo, GLOBALFOUNDRIES Singapore Pte Ltd;
Younan Hua, GLOBALFOUNDRIES Singapore Pte Ltd;
Zhaoxin Yuan, GLOBALFOUNDRIES Singapore Pte Ltd;
Yong Seng Heng, GLOBALFOUNDRIES Singapore Pte Ltd;
Chao Yong Li, GLOBALFOUNDRIES Singapore Pte Ltd
10:45 AM
Systematic Approach for the Gate Oxide Failure Caused by Arsenic Cross Contamination
Dr. Lei Zhu, Globalfoundries Singapore Pte. Ltd.;
Huipeng Ng, Globalfoundries Singapore Pte. Ltd.;
Yanhua Huang, Globalfoundries Singapore Pte. Ltd.;
Han Wei Teo, Globalfoundries Singapore Pte. Ltd.;
Kenny Ong, Globalfoundries Singapore Pte. Ltd.;
Shuting Chen, Globalfoundries Singapore Pte. Ltd.;
Changqing Chen, Globalfoundries Singapore Pte. Ltd.;
Ghim Boon Ang, Globalfoundries Singapore Pte. Ltd.;
You Nan Hua, Globalfoundries Singapore Pte. Ltd.;
Zheng Li, Globalfoundries Singapore Pte. Ltd.