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15.3 Tomographic Study of Silicon Nanoparticles in Nanocrystal Nonvolatile Flash Memory Devices by EFTEM

Wednesday, November 14, 2012: 11:10 AM
101AB (Phoenix Convention Center)
Dr. Yongkai Zhou , GLOBALFOUNDRIES Singapore, Singapore, Singapore
Jie Zhu , GLOBALFOUNDRIES Singapore, Singapore, Singapore
Anyan Du , GLOBALFOUNDRIES Singapore, Singapore, Singapore
Younan Hua , GLOBALFOUNDRIES Singapore, Singapore, Singapore
SiPing Zhao , GLOBALFOUNDRIES Singapore, Singapore, Singapore
See more of: Session 15: TEM Defect Detection
See more of: Symposium