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15 Session 15: TEM Defect Detection

Wednesday, November 14, 2012: 10:20 AM-12:00 PM
101AB (Phoenix Convention Center)
Session Chairs:
Mr. Terence Kane and Mr. Phil Kaszuba
10:20 AM
15.1
Four Stages of Defect Creation in Epitaxial Structures: High Resolution X-Ray Diffraction and Transmission Electron Microscopy Characterization
Dr. Nikolai N. Faleev, Arizona State University; Prof. David J. Smith, Arizana State University; Prof. Christiana B. Honsberg, Arizona State University
10:45 AM
15.2
A Proof for Possibility of Ce-Oxide From CMP Residuals In Si-Wafer by Analytical TEM
Dr. Wayne Zhao, GLOBALFOUNDRIES; Dr. Michael Gribelyuk, IBM; Dr. Liem Do Thanh, GLOBALFOUNDRIES; Mary-Ann zaits, IBM; Wing L. Lai, IBM
11:10 AM
15.3
Tomographic Study of Silicon Nanoparticles in Nanocrystal Nonvolatile Flash Memory Devices by EFTEM
Dr. Yongkai Zhou, GLOBALFOUNDRIES Singapore; Jie Zhu, GLOBALFOUNDRIES Singapore; Anyan Du, GLOBALFOUNDRIES Singapore; Younan Hua, GLOBALFOUNDRIES Singapore; SiPing Zhao, GLOBALFOUNDRIES Singapore
11:35 AM
15.4
Energy-Filtered Imaging of Polysilicon Defects, Gate Dielectric and Silicon Nanocrystals Using Low Loss Plasmon Peaks
Dr. Sam Subramanian, Freescale Semiconductor, Inc.
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