Precise Localization of 28nm Via Chain Resistive Defect Using EBAC and Nanoprobing

Monday, November 12, 2012: 1:50 PM

102AB (Phoenix Convention Center)

Mr. P. Larre , STMicroelectronics, Crolles, France

Ms. H. Tupin , STMicroelectronics, Crolles, France

Mr. C. Charles , STMicroelectronics, Crolles, France

Mr. R. H. Newton , DCG Systems, Richardson, TX

Dr. Antoine Reverdy , SECTOR TECHNOLOGIES, Gières, France

3.2 Precise Localization of 28nm Via Chain Resistive Defect Using EBAC and Nanoprobing