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5.2 Study of Static Noise Margin, Cell Stability and Influence of Electron Beam on Sub-30nm SRAM Using SEM-Based Nanoprobing with 8 Nanoprobes

Monday, November 12, 2012: 3:45 PM
102AB (Phoenix Convention Center)
Dr. T. H. Ng , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
M. K. Dawood , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
P. K. Tan , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
H. Tan , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
Mr. C.K. Oh , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
J. C. Lam , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
Z. H. Mai , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore
See more of: Session 5: Nanoprobing Applications
See more of: Symposium