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5 Session 5: Nanoprobing Applications

Monday, November 12, 2012: 3:20 PM-4:35 PM
102AB (Phoenix Convention Center)
Session Chairs:
Mr. John Sanders and Mr. Christian Hobert
3:20 PM
5.1
Analysis of An Anomalous Transistor Exhibiting Dual-Vt Characteristics and Its Cause In a 90nm Node CMOS Technology
Mr. Yuk L. Tsang, Freescale Semiconductor Inc.; Dr. Xiang-Dong Wang, Freescale Semiconductor; Reyhan Ricklefs, Intel; Jason Goertz, Freescale Semiconductor Inc.
3:45 PM
5.2
Study of Static Noise Margin, Cell Stability and Influence of Electron Beam on Sub-30nm SRAM Using SEM-Based Nanoprobing with 8 Nanoprobes
Dr. T. H. Ng, Globalfoundries Singapore Pte. Ltd.; M. K. Dawood, Globalfoundries Singapore Pte. Ltd.; P. K. Tan, Globalfoundries Singapore Pte. Ltd.; H. Tan, Globalfoundries Singapore Pte. Ltd.; Mr. C.K. Oh, Globalfoundries Singapore Pte. Ltd.; J. C. Lam, Globalfoundries Singapore Pte. Ltd.; Z. H. Mai, Globalfoundries Singapore Pte. Ltd.
4:10 PM
5.3
Leaky Device Channel Anomaly Identification and Case Study by Nano-Probing Technique, Curve Fitting and Model Analysis
Dr. San-Lin Liew, Inotera Memories, Inc.; Mr. Wei-Chih Wang, Inotera Memories Inc.; Hua-Sheng Chen, Inotera Memories Inc.; Jian-Shing Luo, Inotera Memories Inc.
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