9.2 A Comprehensive Failure Analysis Metrology and Mechanism Study on Ultra-low-k Film Adhesion Failure

Tuesday, November 13, 2012: 10:20 AM
102AB (Phoenix Convention Center)
Dr. Shuting Chen , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Lei Zhu , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Han Wei Teo , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Dr. Binghai Liu , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Yanhua Huang , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Kian Kok, Kenny Ong , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Zhiqiang Mo , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Younan Hua , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Zhaoxin Yuan , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Yong Seng Heng , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Chao Yong Li , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore