Novel Plasma FIB/SEM for High Speed Failure Analysis and Real Time Imaging of Large Volume Removal

Monday, November 12, 2012: 11:35 AM

101AB (Phoenix Convention Center)

Dr. Tomas Hrncir , TESCAN, a.s., Brno, Czech Republic

Dr. Anne Delobbe , Orsay Physics S.A., Fuveau, France

Dr. Olivier Salord , Orsay Physics S.A., Fuveau, France

Dr. Filip Lopour , TESCAN, a.s., Brno, Czech Republic

Dr. Martin Zadrazil , TESCAN, a.s., Brno, Czech Republic

Dr. Pierre Sudraud , Orsay Physics S.A., Fuveau, France

1.5 Novel Plasma FIB/SEM for High Speed Failure Analysis and Real Time Imaging of Large Volume Removal