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21.2
Simple and Fast Backside Sample Preparation Technique for Backside Fault Localization Analysis by Using Chemical Etching Method
Thursday, November 15, 2012: 1:20 PM
101AB (Phoenix Convention Center)
Mr. HoonYen Gwee
,
INFINEON TECHNOLOGIES, Malacca, Malaysia
KiongKay Ng
,
INFINEON TECHNOLOGIES, Malacca, Malaysia
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Session 21: Chip Level Sample Prep
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Symposium