VIS-NIR LED Illumination in Backside Circuit Edit and Optical Probing Applications

Thursday, November 15, 2012: 1:45 PM

102AB (Phoenix Convention Center)

Dr. Shida Tan , Intel Corporation, Santa Clara, CA

Mr. Richard Livengood , Intel Corporation, Santa Clara, CA

Mr. Dane Scott , Intel Corporation, Folsom, CA

Roy Hallstein , Intel Corporation, Santa Clara, CA

Patrick Pardy , Intel Corporation, Folsom, CA

Mr. John Giacobbe , Intel Corporation, Folsom, CA

22.3 VIS-NIR LED Illumination in Backside Circuit Edit and Optical Probing Applications