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15.4 Energy-Filtered Imaging of Polysilicon Defects, Gate Dielectric and Silicon Nanocrystals Using Low Loss Plasmon Peaks

Wednesday, November 14, 2012: 11:35 AM
101AB (Phoenix Convention Center)
Dr. Sam Subramanian , Freescale Semiconductor, Inc., Austin, TX
See more of: Session 15: TEM Defect Detection
See more of: Symposium